Title :
Recent advances in process synthesis for semiconductor devices
Author :
Hosack, Harold H. ; Mozumder, Purnendu K. ; Pollack, Gordon P.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fDate :
3/1/1998 12:00:00 AM
Abstract :
Recently, work has been started on a new methodology, called process synthesis, that has the potential to revolutionize integrated circuit (IC) process design in the same way that ASIC and microelectronics manufacturing science and technology (MMST) revolutionized circuit design and factory operation. This paper provides an overview of process synthesis, discusses synthesis methodologies, potential roadblocks to execution of this strategy, and presents recent progress in developing this capability
Keywords :
integrated circuit technology; semiconductor technology; integrated circuit process design; process synthesis; semiconductor device; Application specific integrated circuits; Circuit synthesis; Integrated circuit manufacture; Integrated circuit synthesis; Integrated circuit technology; Manufacturing processes; Microelectronics; Process design; Semiconductor device manufacture; Semiconductor devices;
Journal_Title :
Electron Devices, IEEE Transactions on
