DocumentCode
1341405
Title
Inhomogeneous thin film optical filters fabricated using glancing angle deposition
Author
Robbie, K. ; Hnatiw, A.J.P. ; Brett, M.J. ; MacDonald, R.I. ; McMullin, J.N.
Author_Institution
Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada
Volume
33
Issue
14
fYear
1997
fDate
7/3/1997 12:00:00 AM
Firstpage
1213
Lastpage
1214
Abstract
A novel method for fabricating inhomogeneous thin film optical interference filters is discussed. Glancing angle deposition (GLAD) and substrate motion are used to create a single material thin film with periodic index variation as a function of thickness. Filters fabricated with this technique promise to be much simpler and cheaper to produce and to have much lower stress than interference filters fabricated with other techniques
Keywords
optical films; fabrication; glancing angle deposition; inhomogeneous thin film optical interference filter; substrate motion;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19970834
Filename
603577
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