Title :
Inhomogeneous thin film optical filters fabricated using glancing angle deposition
Author :
Robbie, K. ; Hnatiw, A.J.P. ; Brett, M.J. ; MacDonald, R.I. ; McMullin, J.N.
Author_Institution :
Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada
fDate :
7/3/1997 12:00:00 AM
Abstract :
A novel method for fabricating inhomogeneous thin film optical interference filters is discussed. Glancing angle deposition (GLAD) and substrate motion are used to create a single material thin film with periodic index variation as a function of thickness. Filters fabricated with this technique promise to be much simpler and cheaper to produce and to have much lower stress than interference filters fabricated with other techniques
Keywords :
optical films; fabrication; glancing angle deposition; inhomogeneous thin film optical interference filter; substrate motion;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970834
