Microplasma Jets Generated by Arrays of Microchannels Fabricated in Flexible Molded Plastic

Author

Ma, J.H. ; Shih, D.C. ; Park, S.-J. ; Eden, J.G.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA

Volume

39

Issue

11

fYear

2011

Firstpage

2700

Lastpage

2701

Abstract

Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 × 2 have been constructed and demonstrated to date. Having a channel diameter of 340 ± 5 μm and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend ~3.6 mm into laboratory air for a He gas flow rate of ~4.6 standard liters per minute.

Keywords

microchannel flow; microfabrication; plasma diagnostics; plasma jets; plasma production; polymers; transparency; flexible molded plastic; flexible polymer; gas flow rate; layer-by-layer assembly process; microchannel arrays; microplasma jet devices; microplasma jet generation; moldable polymer; plasma microjets; resilient polymer; size 340 mum; size 4 mm; transparent polymer; undercured polymer; Helium; Laboratories; Metals; Microchannel; Plasmas; Polymers; Atmospheric pressure; microplasmas; optical spectroscopy; plasma jets;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2165564

Filename

6035795