• DocumentCode
    1341725
  • Title

    GaN Substrates for III-Nitride Devices

  • Author

    Paskova, Tanya ; Hanser, Drew A. ; Evans, Keith R.

  • Author_Institution
    Kyma Technol., Inc., Raleigh, NC, USA
  • Volume
    98
  • Issue
    7
  • fYear
    2010
  • fDate
    7/1/2010 12:00:00 AM
  • Firstpage
    1324
  • Lastpage
    1338
  • Abstract
    Despite the rapid commercialization of III-nitride semiconductor devices for applications in visible and ultraviolet optoelectronics and in high-power and high-frequency electronics, their full potential is limited by two primary obstacles: i) a high defect density and biaxial strain due to the heteroepitaxial growth on foreign substrates, which result in lower performance and shortened device lifetime, and ii) a strong built-in electric field due to spontaneous and piezoelectric polarization in the wurtzite structures along the well-established [0001] growth direction for nitrides. Recent advances in the research, development, and commercial production of native GaN substrates with low defect density and high structural and optical quality have opened opportunities to overcome both of these obstacles and have led to significant progress in the development of several optoelectronic and high-power devices. In this paper, the recent achievements in bulk GaN growth development using different approaches are reviewed; comparison of the bulk materials grown in different directions is made; and the current achievements in device performance utilizing native GaN substrate material are summarized.
  • Keywords
    integrated optoelectronics; substrates; GaN; biaxial strain; heteroepitaxial growth; high defect density; high frequency electronics; low defect density; optical quality; piezoelectric polarization; semiconductor device; substrates; ultraviolet optoelectronics; wurtzite structures; Conducting materials; Crystalline materials; Epitaxial growth; Gallium nitride; HEMTs; III-V semiconductor materials; Light emitting diodes; MODFETs; Optical materials; Silicon; Substrates; Thermal conductivity; Ammonothermal growth; Schottky diodes; doping; gallium nitride (GaN); heterostructure field-effect transistor (HFET); hydride vapor phase epitaxy; laser diode (LD); light-emitting diode (LED); native substrates; point defects; solution growth; structural defects; surface orientation; thermal conductivity;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/JPROC.2009.2030699
  • Filename
    5340701