Waveguide-integrated InP-InGaAs-InAlGaAs MSM photodetector with very-high vertical-coupling efficiency

Author

Kollakowski, S. ; Bottcher, E.H. ; Lemm, C. ; Strittmatter, A. ; Bimberg, D. ; Krautle, H.

Author_Institution

Inst. fur Festkorperphys., Tech. Univ. Berlin, Germany

Volume

9

Issue

4

fYear

1997

fDate

4/1/1997 12:00:00 AM

Firstpage

496

Lastpage

498

Abstract

We report on a novel implementation of long-wavelength vertically-coupled waveguide-integrated metal-semiconductor-metal (MSM) InGaAs photodetectors which results in a significantly improved guide-to-absorber coupling efficiency. By employing an In/sub 0.53/Al/sub 0.31/Ga/sub 0.16/As buried strip waveguide embedded in InP, a coupling length of only 20 μm is sufficient to obtain an internal quantum efficiency greater than 95%. Moreover, the photoresponse is found to be virtually independent of the polarization state of light coupled into the input waveguide. The device parameters agree with the results of eigenmode calculations.

Keywords

aluminium compounds; eigenvalues and eigenfunctions; gallium arsenide; high-speed optical techniques; indium compounds; infrared detectors; integrated optics; light absorption; metal-semiconductor-metal structures; optical communication equipment; optical couplers; optical waveguides; 20 mum; 95 percent; In/sub 0.53/Al/sub 0.31/Ga/sub 0.16/As; In/sub 0.53/Al/sub 0.31/Ga/sub 0.16/As buried strip waveguide; InP; InP-InGaAs-InAlGaAs MSM photodetector; coupling length; device parameters; eigenmode calculations; guide-to-absorber coupling efficiency; input waveguide; internal quantum efficiency; long-wavelength vertically-coupled waveguide-integrated MSM InGaAs photodetectors; photoresponse; polarization state; very-high vertical-coupling efficiency; waveguide-integrated; Absorption; Bandwidth; Detectors; Impedance matching; Indium gallium arsenide; Indium phosphide; Optical waveguides; PIN photodiodes; Photodetectors; Semiconductor waveguides;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.559400

Filename

559400