Title :
Silicon-micromachined scanning confocal optical microscope
Author :
Dickensheets, David L. ; Kino, Gordon S.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
fDate :
3/1/1998 12:00:00 AM
Abstract :
We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described. Sample images acquired using the instrument are also presented
Keywords :
elemental semiconductors; micromachining; optical fabrication; optical microscopes; silicon; Si; assembly; design; fabrication; fused silica; imaging instrument; silicon micromachined scanning confocal optical microscope; Biomedical optical imaging; Lenses; Mirrors; Optical devices; Optical fiber devices; Optical fibers; Optical imaging; Optical microscopy; Optical refraction; Silicon;
Journal_Title :
Microelectromechanical Systems, Journal of
