Title :
An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling
Author :
Legtenberg, Rob ; Berenschot, Erwin ; van Baar, John ; Elwenspoek, Miko
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fDate :
3/1/1998 12:00:00 AM
Abstract :
This paper presents design issues and a theoretical model of electrostatically driven axial-gap polysilicon wobble motors. The motor design benefits from large axial rotor-to-stator overlap and large gear ratios, and motor designs with rotor radii of 50 and 100 μm are capable of generating torques in the nanoNewtonmeter range at high electrostatic fields. Because of the large gear ratio, smaller angular steps and lower rotational speed are obtained, compared to radial-gap motor designs. Aspects like gear ratio, torque generation, excitation schemes and torque coverage, normal forces, friction, rotor kinetics, and dynamical behavior are addressed. The motor design is compliant to the integration of gear linkages with respect to mechanical power transmission
Keywords :
electrostatic devices; elemental semiconductors; micromotors; semiconductor device models; silicon; torque; 100 micron; 50 micron; Si; angular steps; axial rotor-to-stator overlap; axial-gap polysilicon wobble motor; dynamical behavior; electrostatic fields; electrostatic lower stator; excitation schemes; gear linkages; gear ratio; gear ratios; mechanical power transmission; motor designs; rotational speed; rotor kinetics; rotor radii; torque coverage; torque generation; torques; Couplings; Electrostatics; Friction; Gears; Kinetic theory; Mechanical power transmission; Micromotors; Rotors; Stators; Torque;
Journal_Title :
Microelectromechanical Systems, Journal of
