Title :
Capacitance Compact Model for Ultrathin Low-Electron-Effective-Mass Materials
Author :
Mudanai, Sivakumar ; Roy, Ananda ; Kotlyar, Roza ; Rakshit, Titash ; Stettler, Mark
Author_Institution :
Process Technol. Modeling, Intel, Hillsboro, OR, USA
Abstract :
We present a compact model to calculate the capacitance of undoped high-mobility low-density-of-states materials in double-gate device architecture. Analytical equations for estimating the subband energies, while taking the effect of wavefunction penetration into the gate oxide and the effective mass discontinuity, are presented for the first time in a compact modeling framework. The surface potential equation for a two subband system is solved, assuming Fermi-Dirac statistics, and compared to numerical Schrodinger-Poisson simulations. The importance of accurately treating the charge profile distribution is illustrated, and an analytical expression for the effective oxide thickness to model the charge centroid is developed.
Keywords :
MOSFET; Poisson equation; Schrodinger equation; capacitance; fermion systems; semiconductor device models; Fermi-Dirac statistics; capacitance compact model; charge profile distribution; double-gate device architecture; effective mass discontinuity; gate oxide; low-density-of-states materials; numerical Schrodinger-Poisson simulations; oxide thickness; subband energy; surface potential equation; ultrathin low-electron-effective-mass materials; wavefunction penetration; Effective mass; Equations; Logic gates; Mathematical model; Numerical simulation; Quantum capacitance; Compact model; III–V; density of states (DOS); quantum capacitance;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2011.2168529