Title :
Widely tunable Fabry-Perot filter using Ga(Al)As-AlOx deformable mirrors
Author :
Tayebati, P. ; Wang, P.D. ; Vakhshoori, D. ; Sacks, Robert N.
Author_Institution :
CoreTek Inc., Burlington, MA, USA
fDate :
3/1/1998 12:00:00 AM
Abstract :
A microelectromechanically tunable Fabry-Perot (FP) microinterferometer is demonstrated using Ga(Al)As-AlO/sub x/ DBR micromirrors separated by an air gap. The broad-spectral response of Ga(Al)As-AlO/sub x/ distributed Bragg reflector (DBR) micromirrors allows 3-dB bandwidth of the cavity to remain narrow and stable over the tuning range. Two devices with different number of mirror structures were demonstrated exhibiting linewidths of 0.5 and 2.0 nm, tuning ranges of 59 and 83 nm, respectively. In addition to a fundamental FP spatial mode, we also observe higher order spatial modes that we associate with a lensing effect caused by partially oxidized AlGaAs layers within the mirror layers.
Keywords :
Fabry-Perot resonators; III-V semiconductors; aluminium compounds; gallium arsenide; mirrors; optical communication equipment; optical filters; tuning; wavelength division multiplexing; Ga(Al)As-AlO/sub x/ DBR micromirrors; Ga(Al)As-AlO/sub x/ deformable mirrors; GaAlAs-AlO; broad-spectral response; fundamental FP spatial mode; higher order spatial modes; linewidths; microelectromechanically tunable Fabry-Perot microinterferometer; partially oxidized AlGaAs layers; tuning range; widely tunable Fabry-Perot filter; Distributed Bragg reflectors; Etching; Fabry-Perot; Filters; Gallium arsenide; Laser tuning; Mirrors; Oxidation; Reflectivity; Tunable circuits and devices;
Journal_Title :
Photonics Technology Letters, IEEE
