DocumentCode
1342556
Title
Widely tunable Fabry-Perot filter using Ga(Al)As-AlOx deformable mirrors
Author
Tayebati, P. ; Wang, P.D. ; Vakhshoori, D. ; Sacks, Robert N.
Author_Institution
CoreTek Inc., Burlington, MA, USA
Volume
10
Issue
3
fYear
1998
fDate
3/1/1998 12:00:00 AM
Firstpage
394
Lastpage
396
Abstract
A microelectromechanically tunable Fabry-Perot (FP) microinterferometer is demonstrated using Ga(Al)As-AlO/sub x/ DBR micromirrors separated by an air gap. The broad-spectral response of Ga(Al)As-AlO/sub x/ distributed Bragg reflector (DBR) micromirrors allows 3-dB bandwidth of the cavity to remain narrow and stable over the tuning range. Two devices with different number of mirror structures were demonstrated exhibiting linewidths of 0.5 and 2.0 nm, tuning ranges of 59 and 83 nm, respectively. In addition to a fundamental FP spatial mode, we also observe higher order spatial modes that we associate with a lensing effect caused by partially oxidized AlGaAs layers within the mirror layers.
Keywords
Fabry-Perot resonators; III-V semiconductors; aluminium compounds; gallium arsenide; mirrors; optical communication equipment; optical filters; tuning; wavelength division multiplexing; Ga(Al)As-AlO/sub x/ DBR micromirrors; Ga(Al)As-AlO/sub x/ deformable mirrors; GaAlAs-AlO; broad-spectral response; fundamental FP spatial mode; higher order spatial modes; linewidths; microelectromechanically tunable Fabry-Perot microinterferometer; partially oxidized AlGaAs layers; tuning range; widely tunable Fabry-Perot filter; Distributed Bragg reflectors; Etching; Fabry-Perot; Filters; Gallium arsenide; Laser tuning; Mirrors; Oxidation; Reflectivity; Tunable circuits and devices;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.661421
Filename
661421
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