Title :
Integrated 119-μm linear corner-cube array
Author :
Gearhart, Steven S. ; Ling, Curtis C. ; Rebeiz, Gabriel M. ; Davée, Hemant ; Chin, Gordon
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
7/1/1991 12:00:00 AM
Abstract :
An integrated corner-cube antenna has been designed, fabricated, and measured at 119 μm. The structure consists of a traveling-wave antenna integrated on a 1-μm dielectric membrane and suspended in a longitudinal cavity etched in silicon wafers. The patterns at 119 μm agree well with millimeter-wave patterns measured on a scaled antenna at 222 GHz. A directivity of 18±0.5 dB is calculated from E- and H-plane measurements. This work demonstrates that high-efficiency integrated corner-cube antennas are easily scalable to terahertz frequencies and could be used for radio-astronomical and plasma-diagnostic applications
Keywords :
antenna radiation patterns; antenna travelling wave arrays; microwave antenna arrays; 119 micron; 222 GHz; EHF; Si wafer; dielectric membrane; integrated corner-cube antenna; linear corner-cube array; longitudinal cavity; millimeter-wave patterns; plasma-diagnostic applications; radioastronomical applications; traveling-wave antenna; Antenna measurements; Biomembranes; Dielectric measurements; Etching; Frequency; Linear antenna arrays; Millimeter wave measurements; Plasma applications; Plasma measurements; Silicon;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
