DocumentCode
1344001
Title
5th International Symposium on Semiconductor Manufacturing (ISSM´96)
Volume
11
Issue
1
fYear
1998
fDate
2/1/1998 12:00:00 AM
Abstract
The following topics were dealt with: fab design and management, information systems, defect reduction and yield enhancement, ultra clean technology, equipment/process optimization and innovation, and environmental issues
Keywords
semiconductor device manufacture; defect reduction; environmental issues; equipment optimization; fab design; fab management; information systems; process optimization; semiconductor manufacturing; ultra clean technology; yield enhancement;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/66.662034
Filename
662034
Link To Document