Optical Manipulation of Microparticles in an SU-8/PDMS Hybrid Microfluidic Chip Incorporating a Monolithically Integrated On-Chip Lens Set

An SU-8/PDMS microfluidic chip incorporating a monolithically integrated on-chip lens set for transport and manipulation of microparticles is developed. The components, including the on-chip lens set, the microfluidic channel, and the fiber grooves, are defined in a single layer of SU-8 by one-step photolithography. The design of the on-chip lens set and the fabrication of the microfluidic chip are fully described. The influence of the beam-waist radius on the manipulation performance is theoretically analyzed and experimentally verified for the first time. In the cross-type optofluidic architecture, the evaluation is performed by measuring the particle displacement with different beam-waist radii under different fluid-flow rates. The on-chip lens set is designed to have a specific dimension to achieve the required beam-waist radius. It is revealed that the particle displacement is counter-proportional to the beam-waist radius. An experiment is performed. The results show that the particle displacement is increased by reducing the beam-waist radius. The optical manipulation of microparticles is also demonstrated by using two counter-propagating light beams that are perpendicular to the fluid-flow direction with the beam-waist radius determined by two on-chip lens sets placed on the two sides of the microfluidic channel. The proposed architecture could be used to enhance the performance in particle transport, separation, and concentration.