Deposition and characterization of CdZnTe thin films for gas microstrip detectors

Author

Sudharsanan, R. ; Karam, N.H. ; Halverson, W.D. ; Greenwald, A.C. ; Dixit, M. ; Dubeau, J. ; Somerville, E.

Author_Institution

Spire Corp., Bedford, MA, USA

Volume

44

Issue

3

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

665

Lastpage

670

Abstract

Deposition, characterization, fabrication and performance of gas microstrip detectors (GMDs) using CdZnTe thin films to control surface resistivity are reported. CdZnTe thin films deposited on glass or on flexible plastic substrates are attractive for GMDs since CdZnTe bulk resistivity varies in the range 10⁹ to 10¹¹ ohm-cm and CdZnTe films with good uniformity can be deposited over large areas using inexpensive deposition techniques. Metalorganic chemical vapor deposition was used to form CdZnTe thin films on glass and flexible plastic substrates. The sheet resistance for 1 μm thick CdZnTe film on glass varied in the range 10¹¹ to 10¹³ ohm/square depending on the growth conditions. GMDs were fabricated using CdZnTe films deposited on glass substrates and tested for energy response to ⁵⁵Fe X-rays. The well-resolved peaks (5.9 keV X-ray and 2.9 keV escape peak) clearly show the ability to successfully fabricate CdZnTe thin films on GMDs

Keywords

CVD coatings; II-VI semiconductors; X-ray detection; cadmium compounds; chemical vapour deposition; position sensitive particle detectors; proportional counters; semiconductor thin films; ternary semiconductors; zinc compounds; 1 mum; CdZnTe; CdZnTe thin films; X-ray detection; characterization; deposition; fabrication; flexible plastic substrates; gas microstrip detectors; glass; glass substrates; metalorganic chemical vapor deposition; performance; plastic substrates; surface resistivity; Chemical vapor deposition; Conductivity; Detectors; Fabrication; Glass; Microstrip; Plastic films; Sputtering; Substrates; X-rays;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/23.603730

Filename

603730