Title :
Deposition and characterization of CdZnTe thin films for gas microstrip detectors
Author :
Sudharsanan, R. ; Karam, N.H. ; Halverson, W.D. ; Greenwald, A.C. ; Dixit, M. ; Dubeau, J. ; Somerville, E.
Author_Institution :
Spire Corp., Bedford, MA, USA
fDate :
6/1/1997 12:00:00 AM
Abstract :
Deposition, characterization, fabrication and performance of gas microstrip detectors (GMDs) using CdZnTe thin films to control surface resistivity are reported. CdZnTe thin films deposited on glass or on flexible plastic substrates are attractive for GMDs since CdZnTe bulk resistivity varies in the range 109 to 1011 ohm-cm and CdZnTe films with good uniformity can be deposited over large areas using inexpensive deposition techniques. Metalorganic chemical vapor deposition was used to form CdZnTe thin films on glass and flexible plastic substrates. The sheet resistance for 1 μm thick CdZnTe film on glass varied in the range 1011 to 1013 ohm/square depending on the growth conditions. GMDs were fabricated using CdZnTe films deposited on glass substrates and tested for energy response to 55Fe X-rays. The well-resolved peaks (5.9 keV X-ray and 2.9 keV escape peak) clearly show the ability to successfully fabricate CdZnTe thin films on GMDs
Keywords :
CVD coatings; II-VI semiconductors; X-ray detection; cadmium compounds; chemical vapour deposition; position sensitive particle detectors; proportional counters; semiconductor thin films; ternary semiconductors; zinc compounds; 1 mum; CdZnTe; CdZnTe thin films; X-ray detection; characterization; deposition; fabrication; flexible plastic substrates; gas microstrip detectors; glass; glass substrates; metalorganic chemical vapor deposition; performance; plastic substrates; surface resistivity; Chemical vapor deposition; Conductivity; Detectors; Fabrication; Glass; Microstrip; Plastic films; Sputtering; Substrates; X-rays;
Journal_Title :
Nuclear Science, IEEE Transactions on
