Prototype feedback-controlled bidirectional actuation system for MEMS applications

Author

Bhansali, Shekhar ; Zhang, Andy Lei ; Zmood, Ronald B. ; Jones, Paul E. ; Sood, Dinesh K.

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

Volume

9

Issue

2

fYear

2000

fDate

6/1/2000 12:00:00 AM

Firstpage

245

Lastpage

251

Abstract

We have successfully developed a one degree-of-freedom microsuspension system, with active position control, as a paradigm of a micromagnetic bearing. This system integrates an electromagnetic actuator, a position sensor, and a feedback control system that provides active position control. This paper discusses the design and fabrication details of the microelectromechanical system (MEMS) components: the beam mass structure integrated with a drive coil and metallized targets, spacer plate, and sensor coils. It also discusses their integration with millimagnets and electronics. Noncontact magnetic bearings based on this principle have the potential of overcoming the tribo-physical issues associated with active MEMS devices.

Keywords

feedback; magnetic bearings; microactuators; position control; MEMS device; active position control; beam mass structure; bidirectional actuation system; electromagnetic actuator; feedback control; microelectromechanical system; micromagnetic bearing; one degree-of-freedom microsuspension system; position sensor; Actuators; Coils; Fabrication; Feedback control; Microelectromechanical systems; Micromagnetics; Micromechanical devices; Position control; Prototypes; Sensor systems;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.846705

Filename

846705