Title :
Parameter space for collisionless RF sheaths
Author :
Manheimer, Wallace M.
Author_Institution :
Div. of Plasma Phys., Naval Res. Lab., Washington, DC, USA
fDate :
4/1/2000 12:00:00 AM
Abstract :
As plasma processing reactors approach higher density, the sheath models which neglect the radio frequency (RF) response of the ions become invalid. This work show that the nature of the collisionless RE ion sheath can be described in a number of different regimes of parameter space. These regimes can all be visualized on a single two-dimensional (2-D) plot where the horizontal axis is the ion plasma frequency divided by the frequency, and the vertical axis is the electron oscillating velocity divided by the ion sound speed
Keywords :
plasma density; plasma materials processing; plasma sheaths; 2-D plot; Godyak-Lieberman RF sheath model; collisionless RF ion sheath; collisionless RF sheaths; conduction current; electron oscillating velocity; horizontal axis; ion plasma frequency; ion sound speed; modified DC sheath; parameter space; parameter space regimes; plasma density; plasma materials processing; plasma processing reactors; radio frequency response; sheath edge; sheath models; single two-dimensional plot; visualization; Acceleration; Electrons; Frequency conversion; Inductors; Plasma chemistry; Plasma density; Plasma materials processing; Plasma sheaths; Plasma temperature; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
