DocumentCode
1350948
Title
Electrical Properties and Stability of Dual-Gate Coplanar Homojunction DC Sputtered Amorphous Indium–Gallium–Zinc–Oxide Thin-Film Transistors and Its Application to AM-OLEDs
Author
Baek, Gwanghyeon ; Abe, Katsumi ; Kuo, Alex ; Kumomi, Hideya ; Kanicki, Jerzy
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Volume
58
Issue
12
fYear
2011
Firstpage
4344
Lastpage
4353
Abstract
The electrical characteristics and stability of dual-gate (DG) coplanar homojunction amorphous indium-gallium-zinc-oxide thin-film transistors (a-IGZO TFTs) on glass substrates are described herein. In this device structure, both top gate (TG) and bottom gate are defined by lithography, allowing independent biasing when adjacent TFTs are present. The DG a-IGZO TFT demonstrates excellent electrical performance with subthreshold swing (SS) of 99 mV/dec, field-effect mobility of 15.1 , and on- off current ratio of . By applying various bias voltages on the TG electrode, it is found that the TFT threshold voltage can be controlled without any change of the SS and off current. Under conditions of negative bias temperature stress (BTS), the transfer curves of the TFT exhibit negligible shifts after 10 000 s. Larger shifts are observed under conditions of a positive BTS. Finally, the application of this DG device to active-matrix organic light-emitting displays is suggested.
Keywords
II-VI semiconductors; gallium compounds; indium compounds; lithography; organic light emitting diodes; thin film transistors; wide band gap semiconductors; zinc compounds; AM-OLED; DC sputtered amorphous thin-film transistors; InGaZnO; TFT threshold voltage; active-matrix organic light-emitting displays; bottom gate; dual-gate coplanar homojunction; field-effect mobility; glass substrates; lithography; negative bias temperature stress; subthreshold swing; top gate; transfer curves; Capacitance; Electrodes; Insulators; Logic gates; Stress; Thin film transistors; Threshold voltage; Active-matrix organic light-emitting display (AM-OLED); amorphous indium–gallium–zinc–oxide (a-IGZO); coplanar homojuction; dual gate (DG); thin-film transistor (TFT);
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2011.2168528
Filename
6046118
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