Simultaneous High-Speed High-Resolution Nanomechanical Mass Sensing

Author

Kauth, Christian ; Pastre, Marc ; Kayal, Maher

Author_Institution

Electron. Lab., Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland

Volume

14

Issue

8

fYear

2014

fDate

Aug. 2014

Firstpage

2488

Lastpage

2489

Abstract

Mass sensing has so far rather developed along the resolution axis, reaching atomic-scale detection, than into the direction of high speed. This letter reports on a novel self-calibrating technique that makes high-speed inertial mass sensors capable of instant high-resolution detection and weighing. The sensing nanoelectromechanical resonator is embedded into a phase-locked loop and the sensor-inherent nonlinear phase-frequency relation is exploited for autocalibration.

Keywords

calibration; nanosensors; phase locked loops; resonators; weighing; atomic scale detection; autocalibration; inertial mass sensor; instant high-resolution detection; nanoelectromechanical resonator; nanomechanical mass sensing; phase locked loop; resolution axis; self-calibrating technique; sensor inherent nonlinear phase frequency relation; weighing; Calibration; Frequency modulation; Nanoelectromechanical systems; Phase locked loops; Phase modulation; Resonant frequency; Sensors; Nanoelectromechanical systems; nonlinear systems; phase locked loops; system analysis and design;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2014.2322084

Filename

6819015