DocumentCode :
1351860
Title :
VLSI and other solid-state devices: New fabrication technologies put us on the threshold of a quantum jump in IC complexity
Author :
Torrero, E.A.
Volume :
16
Issue :
1
fYear :
1979
Firstpage :
43
Lastpage :
47
Abstract :
Fabrication techniques have advanced to the point where semiconductor manufacturers are within sight of a long sought goal: achievement of submicrometre feature sizes a monolithic integrated circuit thereby providing a key capability for approaching the ultimate limits in IC complexity.
Keywords :
integrated circuit technology; large scale integration; monolithic integrated circuits; IC complexity; VLSI; monolithic integrated circuit; Fabrication; Microprocessors; Random access memory; Switches; Testing; Transistors; Very large scale integration;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1979.6368066
Filename :
6368066
Link To Document :
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