Title :
VLSI and other solid-state devices: New fabrication technologies put us on the threshold of a quantum jump in IC complexity
Abstract :
Fabrication techniques have advanced to the point where semiconductor manufacturers are within sight of a long sought goal: achievement of submicrometre feature sizes a monolithic integrated circuit thereby providing a key capability for approaching the ultimate limits in IC complexity.
Keywords :
integrated circuit technology; large scale integration; monolithic integrated circuits; IC complexity; VLSI; monolithic integrated circuit; Fabrication; Microprocessors; Random access memory; Switches; Testing; Transistors; Very large scale integration;
Journal_Title :
Spectrum, IEEE
DOI :
10.1109/MSPEC.1979.6368066
