• DocumentCode
    1353238
  • Title

    Linear Arrays of Microchannel Plasmas in Monolithic \\hbox {Al/Al}_{2}\\hbox {O}_{3} Sheets

  • Author

    Kim, K.S. ; Park, S.-J. ; Eden, J.G.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2698
  • Lastpage
    2699
  • Abstract
    Linear microplasmas have been produced within rectangular channels, 75 × 75 μm2 in cross section and 7 cm in length. Arrays of such channels have been fabricated in single sheets of 127-μm-thick aluminum foil by a photolithographic step and an electrochemical process. Arrays comprising 20 parallel channels have been operated in the rare gases, N2, and air at pressures in the 100-760-Torr interval.
  • Keywords
    alumina; aluminium; electrochemistry; microchannel flow; microfabrication; photolithography; plasma devices; Al-Al2O3; aluminum foil; electrochemical process; linear arrays; microchannel plasmas; monolithic sheets; photolithographic step; pressure 100 torr to 760 torr; rectangular channels; size 127 mum; size 7 cm; size 75 mum; Aluminum oxide; Electrodes; Microcavities; Microchannel; Plasma devices; Arrays; microcavity plasmas; microchannels; microplasmas;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2165563
  • Filename
    6051520
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1353238