• DocumentCode
    1353542
  • Title

    Non-Imaging Optical Method for Multi-Sensing of Gases Based on Porous Silicon

  • Author

    Hutter, Tanya ; Ruschin, Shlomo

  • Author_Institution
    Dept. of Phys. Electron., Tel Aviv Univ., Tel Aviv, Israel
  • Volume
    10
  • Issue
    1
  • fYear
    2010
  • Firstpage
    97
  • Lastpage
    103
  • Abstract
    We demonstrate an optical sensor for the detection of ammonia in gaseous phase under a changing humidity environment. The sensor is based on a sectioned nano-structured porous silicon (PSi) device in which the parts react distinctly to ammonia and water vapor. The distinct sensing is necessary since most ammonia indicators´ sensitivities are highly dependent on the ambient relative humidity. The sensor is interrogated with a single white-light beam, and changes in the reflectivity sensor are monitored. The combined interference pattern from both PSi sections is observed and measured under various concentrations of ammonia and water vapor. The structure is designed to frequency encode the reflectivity spectrum and Fourier-transform data-analysis is applied in order to enable simple discrimination between different ammonia and water vapor concentrations. The method allows remote and distance-insensitive analysis of gases in breath and other gaseous environments.
  • Keywords
    Fourier transforms; ammonia; chemical variables measurement; gas sensors; humidity; nanostructured materials; optical sensors; porous materials; reflectivity; sensor fusion; Fourier-transform data-analysis; ammonia; distance-insensitive analysis; gaseous phase; multisensing; nanostructured porous silicon device; nonimaging optical method; optical sensor; reflectivity spectrum; relative humidity; sensor; single white-light beam; water vapor; Gases; Humidity; Interference; Monitoring; Nanoscale devices; Optical sensors; Phase detection; Pressure measurement; Reflectivity; Silicon; Ammonia; Fourier transform; optical sensor; pH indicator; porous silicon;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2009.2035770
  • Filename
    5352207