DocumentCode
1353542
Title
Non-Imaging Optical Method for Multi-Sensing of Gases Based on Porous Silicon
Author
Hutter, Tanya ; Ruschin, Shlomo
Author_Institution
Dept. of Phys. Electron., Tel Aviv Univ., Tel Aviv, Israel
Volume
10
Issue
1
fYear
2010
Firstpage
97
Lastpage
103
Abstract
We demonstrate an optical sensor for the detection of ammonia in gaseous phase under a changing humidity environment. The sensor is based on a sectioned nano-structured porous silicon (PSi) device in which the parts react distinctly to ammonia and water vapor. The distinct sensing is necessary since most ammonia indicators´ sensitivities are highly dependent on the ambient relative humidity. The sensor is interrogated with a single white-light beam, and changes in the reflectivity sensor are monitored. The combined interference pattern from both PSi sections is observed and measured under various concentrations of ammonia and water vapor. The structure is designed to frequency encode the reflectivity spectrum and Fourier-transform data-analysis is applied in order to enable simple discrimination between different ammonia and water vapor concentrations. The method allows remote and distance-insensitive analysis of gases in breath and other gaseous environments.
Keywords
Fourier transforms; ammonia; chemical variables measurement; gas sensors; humidity; nanostructured materials; optical sensors; porous materials; reflectivity; sensor fusion; Fourier-transform data-analysis; ammonia; distance-insensitive analysis; gaseous phase; multisensing; nanostructured porous silicon device; nonimaging optical method; optical sensor; reflectivity spectrum; relative humidity; sensor; single white-light beam; water vapor; Gases; Humidity; Interference; Monitoring; Nanoscale devices; Optical sensors; Phase detection; Pressure measurement; Reflectivity; Silicon; Ammonia; Fourier transform; optical sensor; pH indicator; porous silicon;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2009.2035770
Filename
5352207
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