Title :
Characterization of thin-film low-dielectric constant materials in the microwave range using on-wafer parallel-plate transmission lines
Author :
Song, Ge ; Follonier, Stéphane ; Knoesen, André ; Miller, Robert D.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
fDate :
5/1/2000 12:00:00 AM
Abstract :
A method is presented to measure the dielectric properties of a thin film over a broad microwave frequency range. The parallel-plate transmission line geometry offers both the advantages of pronounced sensitivity to thin-film properties and exact computation of the value of the dielectric constant and the loss tangent. With multiline thru-reflect-line calibration techniques, the dielectric constant and loss tangent are determined to an accuracy better than 4% at 10 GHz
Keywords :
calibration; dielectric losses; dielectric measurement; dielectric thin films; microwave measurement; parallel plate waveguides; permittivity; 10 GHz; dielectric constant; loss tangent; microwave range; on-wafer parallel-plate transmission lines; parallel-plate transmission line geometry; thin-film low-dielectric constant materials; thin-film properties; thru-reflect-line calibration techniques; Dielectric constant; Dielectric losses; Dielectric materials; Dielectric measurements; Dielectric thin films; Frequency measurement; Microwave frequencies; Microwave measurements; Transistors; Transmission line measurements;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
