DocumentCode
1354246
Title
Plucked excitation of micromachined silicon DETF resonators
Author
Beeby, S.P. ; Ensell, G. ; Lambert, R. ; White, N.M.
Author_Institution
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
Volume
36
Issue
13
fYear
2000
fDate
6/22/2000 12:00:00 AM
Firstpage
1119
Lastpage
1120
Abstract
A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed
Keywords
elemental semiconductors; micromachining; micromechanical resonators; silicon; vibrations; Si; double-ended tuning fork; driving force; micro-mechanical devices; micromachined DETF resonators; natural frequency; plucked excitation; statically deformed devices;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20000788
Filename
850454
Link To Document