Title :
Plucked excitation of micromachined silicon DETF resonators
Author :
Beeby, S.P. ; Ensell, G. ; Lambert, R. ; White, N.M.
Author_Institution :
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
fDate :
6/22/2000 12:00:00 AM
Abstract :
A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed
Keywords :
elemental semiconductors; micromachining; micromechanical resonators; silicon; vibrations; Si; double-ended tuning fork; driving force; micro-mechanical devices; micromachined DETF resonators; natural frequency; plucked excitation; statically deformed devices;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000788
