• DocumentCode
    1354413
  • Title

    5-bit MEMS distributed phase shifter

  • Author

    Du, Yun ; Bao, J. ; Zhao, Xingang

  • Author_Institution
    Dept. of Electron. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
  • Volume
    46
  • Issue
    21
  • fYear
    2010
  • fDate
    10/1/2010 12:00:00 AM
  • Firstpage
    1452
  • Lastpage
    1453
  • Abstract
    An X-band 5-bit MEMS distributed phase shifter with a total area of 19.110 × 2.646 mm2 is presented. Based on the equivalent-circuit model, a novel design method is applied to design the phase shifter. The basis of the method is to optimise the length of the MEMS device while maintaining a certain return loss. The fabricated phase shifter shows average measured insertion loss of -1.54 dB, return loss of -12.12 dB, and relative phase error of 2.41% for 32 unique phase states at 10 GHz. The MEMS bridge using serpentine flexures is actuated with an actuation voltage of 15 V.
  • Keywords
    micromechanical devices; millimetre wave phase shifters; MEMS bridge; X-band 5-bit MEMS distributed phase shifter; equivalent-circuit model; frequency 10 GHz; loss -1.54 dB; loss -12.12 dB; serpentine flexures; voltage 15 V;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2010.2492
  • Filename
    5604805
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1354413