DocumentCode :
1354928
Title :
Self-aligned oxidised porous silicon optical waveguides with reduced loss
Author :
Vorozov, N. ; Dolgyi, L. ; Yakovtseva, V. ; Bondarenko, V. ; Balucani, M. ; Lamedica, G. ; Ferrari, A. ; Vitrant, G. ; Broquin, J.E. ; Benson, T.M. ; Arrand, H.F. ; Sewell, P.
Author_Institution :
Belarussian State Univ. of Inf. & Radioelectron., Minsk, Russia
Volume :
36
Issue :
8
fYear :
2000
fDate :
4/13/2000 12:00:00 AM
Firstpage :
722
Lastpage :
723
Abstract :
A report is presented into the fabrication of self-aligned oxidised porous silicon optical waveguides, the optical losses of which at both visible and infrared wavelengths are significantly reduced, to around the 1 dB cm-1 limit widely considered as critical for application success
Keywords :
elemental semiconductors; optical fabrication; optical losses; optical waveguides; porous semiconductors; silicon; Si; fabrication; optical loss; self-aligned oxidised porous silicon optical waveguide;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20000490
Filename :
850554
Link To Document :
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