DocumentCode
1355014
Title
Deep submicrometer double-gate fully-depleted SOI PMOS devices: a concise short-channel effect threshold voltage model using a quasi-2D approach
Author
Chen, Shiao-Shien ; Kuo, James B.
Author_Institution
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Volume
43
Issue
9
fYear
1996
fDate
9/1/1996 12:00:00 AM
Firstpage
1387
Lastpage
1393
Abstract
This paper reports a concise short-channel effect threshold voltage model using a quasi-2D approach for deep submicrometer double-gate fully-depleted SOI PMOS devices. By considering the hole density at the front and the back channels simultaneously, the analytical threshold voltage model provides an accurate prediction of the short-channel threshold voltage behavior of the deep submicrometer double-gate fully-depleted SOI PMOS devices as verified by 2D simulation results. The analytical short-channel effect threshold voltage model can also be useful for SOI NMOS devices
Keywords
MIS devices; MOSFET; hole density; semiconductor device models; silicon-on-insulator; 2D simulation results; deep submicrometer double-gate fully-depleted SOI PMOS devices; hole density; long channel analysis; quasi-2D approach; short channel analysis; short-channel effect threshold voltage model; short-channel threshold voltage behavior; Analytical models; Current density; Doping; Electrostatics; MOS devices; Permittivity; Predictive models; Semiconductor thin films; Thin film devices; Threshold voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.535323
Filename
535323
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