• DocumentCode
    1355014
  • Title

    Deep submicrometer double-gate fully-depleted SOI PMOS devices: a concise short-channel effect threshold voltage model using a quasi-2D approach

  • Author

    Chen, Shiao-Shien ; Kuo, James B.

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • Volume
    43
  • Issue
    9
  • fYear
    1996
  • fDate
    9/1/1996 12:00:00 AM
  • Firstpage
    1387
  • Lastpage
    1393
  • Abstract
    This paper reports a concise short-channel effect threshold voltage model using a quasi-2D approach for deep submicrometer double-gate fully-depleted SOI PMOS devices. By considering the hole density at the front and the back channels simultaneously, the analytical threshold voltage model provides an accurate prediction of the short-channel threshold voltage behavior of the deep submicrometer double-gate fully-depleted SOI PMOS devices as verified by 2D simulation results. The analytical short-channel effect threshold voltage model can also be useful for SOI NMOS devices
  • Keywords
    MIS devices; MOSFET; hole density; semiconductor device models; silicon-on-insulator; 2D simulation results; deep submicrometer double-gate fully-depleted SOI PMOS devices; hole density; long channel analysis; quasi-2D approach; short channel analysis; short-channel effect threshold voltage model; short-channel threshold voltage behavior; Analytical models; Current density; Doping; Electrostatics; MOS devices; Permittivity; Predictive models; Semiconductor thin films; Thin film devices; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.535323
  • Filename
    535323