Title :
Antenna coupled far-infrared/THz detector in CMOS
Author :
Morf, Thomas ; Weiss, Jonas ; Kull, Lukas ; Rothuizen, Hugo ; Toifl, Thomas ; Kossel, Marcel ; Menolfi, Christian ; von Bueren, G. ; Brunschwiler, Thomas ; Schmatz, Martin
Author_Institution :
IBM Res. GmbH, Ruschlikon, Switzerland
Abstract :
An infrared detector in standard SOI technology is proposed that comprises an antenna-coupled bolometer and a MOSFET as a sensor. As proof of concept, a logarithmic planar antenna was designed and implemented in 90 nm bulk CMOS technology and connected to the proposed detector. Measurements at 10 m wavelength confirm the feasibility of this approach.
Keywords :
CMOS image sensors; infrared detectors; silicon-on-insulator; terahertz wave imaging; MOSFET; SOI technology; antenna coupled far-infrared/THz detector; antenna-coupled bolometer; bulk CMOS technology; infrared detector; logarithmic planar antenna; wavelength 90 nm;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2009.1991
