Design and analysis of silicon antiresonant reflecting optical waveguides for evanescent field sensor

Author

Prieto, Francisco ; Llobera, Andreu ; Jiménez, David ; Doménguez, Carlos ; Calle, Ana ; Lechuga, Laura M.

Author_Institution

Nat. Centre of Microelectron., Madrid, Spain

Volume

18

Issue

7

fYear

2000

fDate

7/1/2000 12:00:00 AM

Firstpage

966

Lastpage

972

Abstract

Silicon based antiresonant reflecting optical waveguides (ARROW´s) have been designed in order to obtain a high sensitive optical transducer for sensing applications. The designed sensor has an integrated Mach-Zehnder interferometer configuration. The optical waveguides that form its structure have to verify two conditions: monomode behavior and high surface sensitivity. In this paper, we present a theoretical modeling of the propagation characteristics and surface sensitivity of the ARROW structure.

Keywords

Mach-Zehnder interferometers; integrated optics; optical design techniques; optical sensors; optical waveguide theory; optical waveguides; sensitivity; silicon; ARROW; ARROW structure; Si; Si antiresonant reflecting optical waveguide design; designed sensor; evanescent field sensor; high sensitive optical transducer; high surface sensitivity; integrated Mach-Zehnder interferometer configuration; monomode behavior; optical waveguides; propagation characteristics; sensing applications; surface sensitivity; theoretical modeling; Optical design; Optical interferometry; Optical sensors; Optical surface waves; Optical waveguide theory; Optical waveguides; Sensor phenomena and characterization; Silicon; Surface waves; Transducers;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.850742

Filename

850742