Design and Fabrication of an Active Multiaxis Probing System for High Speed Atomic Force Microscopy

Author

Jeong, Younkoo ; Jayanth, G.R. ; Jhiang, Sissy M. ; Menq, Chia-Hsiang

Author_Institution

Dept. of Mech. Eng., Ohio State Univ., Columbus, OH, USA

Volume

9

Issue

3

fYear

2010

fDate

5/1/2010 12:00:00 AM

Firstpage

392

Lastpage

399

Abstract

The design and fabrication of an active multiaxis probing system for high-speed atomic force microscopy is presented. The probing system employs a multiaxis compliant manipulator that is actuated by two magnetic actuators to control the tip position simultaneously along the vertical and the lateral directions. The manipulator is optimally designed to achieve high bandwidth actuation and large scanning range. A novel process to fabricate multiaxis compliant manipulators reliably by using focused ion beam milling is proposed. The fabricated active multiaxis probing system is demonstrated to have high bandwidth of actuation with the lateral and vertical resonance frequencies at 46.4 and 101.5 kHz, respectively. The lateral scanning range is estimated to be ~350 nm at a magnetic field of 20 ?? 10^-4 T. It enables imaging rate of 10 frame/s with pixel resolution of 100 ?? 100 pixels.

Keywords

atomic force microscopy; electromagnetic actuators; focused ion beam technology; manipulators; micropositioning; milling; active multiaxis probing system; bandwidth actuation; focused ion beam milling; frequency 101.5 kHz; frequency 46.4 kHz; high speed atomic force microscopy; imaging rate; lateral scanning range; magnetic actuators; multiaxis compliant manipulator; pixel resolution; resonance frequencies; tip position; Atomic force microscopy (AFM); compliant manipulator; focused ion beam; high-speed atomic force microscopy; magnetic actuation; multiaxis probe;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2009.2029333

Filename

5223601