DocumentCode :
1360784
Title :
Best bits: Applications of microprocessors: Mechanics on a chip
Volume :
18
Issue :
3
fYear :
1981
fDate :
3/1/1981 12:00:00 AM
Firstpage :
24
Lastpage :
26
Abstract :
If one can build a computer on a chip, why not nozzles, pumps, valves, and sensors on chips? Hessarchers at Stanford University´s Integrated Circuits Laboratory and IBM´s San Jose Research Laboratories in California have developed techniques that put devices like these on silicon wafers. The micromechanical structures are fabricated in much the same way as conventional ICs.
Keywords :
Integrated circuits; Laboratories; Microcomputers; Propulsion; Satellites; Silicon; Surface treatment;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1981.6369600
Filename :
6369600
Link To Document :
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