Integrating CAD tools for MEMS design

Author

Gilbert, John R.

Author_Institution

Microcosm Technol. Inc., Cambridge, MA, USA

Volume

31

Issue

4

fYear

1998

fDate

4/1/1998 12:00:00 AM

Firstpage

99

Lastpage

101

Abstract

Microelectromechanical systems, or MEMS, is the generic name for a new class of microsystems. Typically, MEMS are: micron- to millimeter-scale devices with moving parts or containing fluids; parts that are batch fabricated using techniques derived from the semiconductor industry; used as sensors or actuators; and are often directly connected or integrated with ICs. The first MEMS design system, MEMCAD, was built in the Senturia Lab at MIT. Now at least three companies market commercial CAD systems for MEMS. The author discusses MEMCAD system´s capabilities

Keywords

CAD/CAM; circuit CAD; integrated circuit design; mechanical engineering computing; CAD tools; MEMCAD; MEMS design; MIT; actuators; batch fabrication; commercial CAD systems; integrated circuits; microelectromechanical systems; microsystems; millimeter-scale devices; semiconductor industry; sensors; Design automation; Electromechanical sensors; Electronic design automation and methodology; Electrostatics; Mathematical model; Microelectromechanical devices; Micromechanical devices; Packaging; Physics computing; Solid modeling;

fLanguage

English

Journal_Title

Computer

Publisher

ieee

ISSN

0018-9162

Type

jour

DOI

10.1109/2.666845

Filename

666845