Title :
Pentacene-Based Thin-Film Transistors With a Solution-Process Hafnium Oxide Insulator
Author :
Wei, Chia-Yu ; Adriyanto, Feri ; Lin, Yu-Ju ; Li, Yu-Chang ; Huang, Tong-Jyun ; Chou, Dei-Wei ; Wang, Yeong-Her
Author_Institution :
Inst. of Electro-Opt. Sci. & Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
Pentacene-based organic thin-film transistors with solution-process hafnium oxide (HfOx) as gate insulating layer have been demonstrated. The solution-process HfOx could not only exhibit a high-permittivity (kappa = 11) dielectric constant but also has good dielectric strength. Moreover, the root-mean-square surface roughness and surface energy (gammas) on the surface of the HfOx layer were 1.304 nm and 34.24 mJ/cm2, respectively. The smooth, as well as hydrophobic, surface of HfOx could facilitate the direct deposition of the pentacene film without an additional polymer treatment layer, leading to a high field-effect mobility of 3.8 cm2/(V middots) .
Keywords :
hafnium compounds; hydrophobicity; organic semiconductors; permittivity; polymers; solutions; surface energy; surface roughness; surface treatment; thin film transistors; HfOx; dielectric strength; field-effect mobility; gate insulating layer; high-permittivity dielectric constant; hydrophobicity; pentacene-based organic thin-film transistor; polymer treatment layer; root-mean-square surface roughness; size 1.304 nm; solution-process hafnium oxide insulator; surface energy; Hafnium oxide; high permittivity; organic thin-film transistor (OTFT); solution process; surface energy;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2009.2029876