DocumentCode
1361553
Title
Increasing emission current from MIM cathodes by using an Ir-Pt-Au multilayer top electrode
Author
Kusunoki, Toshiaki ; Suzuki, Mutsumi
Author_Institution
Res. Lab., Hitachi Ltd., Tokyo, Japan
Volume
47
Issue
8
fYear
2000
fDate
8/1/2000 12:00:00 AM
Firstpage
1667
Lastpage
1672
Abstract
We investigated the effect of the top electrode materials on the electron emission and durability of metal-insulator-metal (MIM) cathodes. The durability is improved when high sublimation-enthalpy material, such as Ir, Mo, or W, are used; however, the emission current, and the transfer ratio, decrease. The material dependence of the transfer ratio is shown to be dominated by the scattering probability of hot electrons in the metal. The scattering probability was estimated from the metal´s density-of-states, or more simply, from the number of d-electrons. We found that the multilayer top electrode consisting of Ir, Pt, and Au provides the best top electrode combination for MIM cathodes. The high sublimation-enthalpy Ir layer, which is in contact with the insulator, acts as a barrier metal and improves the durability, whereas the surface Au layer maintains the transfer ratio at a high value. With this top electrode structure, emission current density is increased to 5.8 mA/cm2, which is sufficient for field-emission displays. We demonstrated a display consisting of a 30×30-dot MIM cathode-array with the multilayer top electrodes
Keywords
MIM devices; cathodes; current density; field emission displays; gold; hot carriers; iridium; multilayers; platinum; Ir layer barrier metal; Ir-Pt-Au; Ir-Pt-Au multilayer top electrode; MIM cathode-array; MIM cathodes; density-of-states; durability; electron emission; emission current; field-emission displays; high sublimation-enthalpy material; hot electrons; scattering probability; surface Au layer; top electrode materials; transfer ratio material dependence; Cathodes; Electrodes; Electron emission; Flat panel displays; Gold; Inorganic materials; Insulation; Metal-insulator structures; Nonhomogeneous media; Scattering;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.853046
Filename
853046
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