Title :
Instability in low energy beams extracted from BF3 plasma
Author :
Inouchi, Yutaka ; Matsumoto, Tad ; Dohi, Shojiro ; Naito, Masakazu
Author_Institution :
Nissin Ion Equip. Co., Ltd., Koka, Japan
fDate :
June 26 2014-July 4 2014
Abstract :
Ion beam instabilities on a wide ribbon beam which cross-section is 150 cm × 10 cm are discussed. At low energy conditions, we detected two kinds of instabilities on the ion beam extracted from BF3 plasmas. One kind of the instabilities is that onset of the instability is dependent on the extraction current from the ion source. This instability occurred when the extraction current exceeded 300 - 350 mA at the energy of 15keV. Another is that the onset is dependent on the BF2+ beam current. The BF2+ beam current became unstable when it exceeded about 20 μA/cm2 at 15keV. Energy dependence of these instabilities is also discussed.
Keywords :
boron compounds; ion beams; ion sources; plasma immersion ion implantation; BF2+ beam current; BF3 plasma; electron volt energy 15 keV; energy dependence; extraction current; ion beam instability; ion implantation; ion source; low energy beam instability; wide ribbon beam; Current density; Electrodes; Ion beams; Ion sources; Plasmas; Threshold voltage; instability; ion beam; ion doping; ion implantation; ion source; low energy;
Conference_Titel :
Ion Implantation Technology (IIT), 2014 20th International Conference on
Conference_Location :
Portland, OR
DOI :
10.1109/IIT.2014.6940040