• DocumentCode
    1362093
  • Title

    A Quantitative Model for ELDRS and {\\rm H}_{2} Degradation Effects in Irradiated Oxides Based on First Principles Calculations

  • Author

    Rowsey, Nicole L. ; Law, Mark E. ; Schrimpf, Ronald D. ; Fleetwood, Daniel M. ; Tuttle, Blair R. ; Pantelides, Sokrates T.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
  • Volume
    58
  • Issue
    6
  • fYear
    2011
  • Firstpage
    2937
  • Lastpage
    2944
  • Abstract
    A physics-based TCAD model for enhanced low-dose-rate sensitivity in linear bipolar devices is developed. Quantitative agreement is found with measured data over a wide range of dose rates and H2 concentrations. Analysis of the degradation effects of individual defect types, the implementation of which has been informed by first principles calculations, provides insights into the mechanisms behind enhanced low-dose-rate effects in different hydrogen environments. The effects of initial defect concentration and location and the energetics of the defect-related reactions are explored. Conclusions are drawn about the roles of molecular hydrogen and hydrogenated defects in the radiation response of these devices.
  • Keywords
    ab initio calculations; radiation effects; semiconductor process modelling; technology CAD (electronics); defect types; defect-related reaction energetics; degradation effect analysis; enhanced low-dose-rate sensitivity; first principles calculations; hydrogen concentrations; hydrogen degradation effects; hydrogen environments; hydrogenated defects; initial defect concentration; initial defect location; irradiated oxides; linear bipolar devices; low-dose-rate effects; molecular hydrogen; physics-based TCAD model; quantitative model; radiation response; Hydrogen; Logic gates; Mathematical model; Protons; Radiation effects; Sensitivity analysis; $N_{it}$ ; Enhanced low-dose-rate sensitivity (ELDRS);
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.2011.2169458
  • Filename
    6060936