Title :
Fiber ribbon alignment structures based on rhombus-shaped channels in silicon
Author :
Hoffmann, M. ; Dickhut, S. ; Voges, E.
Author_Institution :
Lehrstuhl fur Hochfrequenztech., Dortmund Univ., Germany
fDate :
7/1/2000 12:00:00 AM
Abstract :
A fiber ribbon alignment structure based on bulk silicon micromachining technique with precise rhombus-shaped channels in {100}-silicon is demonstrated. The main advantages are totally buried and thereby protected fibers and a less structured wafer surface suitable for the integration of components on top. The presented structure allows a simplified assembly of fiber ribbon arrays due to integrated funnels for fiber insertion. The accuracy of the channels within an array was found to be /spl plusmn/0.2 μm. Furthermore, this technique allows combining fiber ribbons with a pitch of 250 μm with photodiodes for system monitoring in a single fiber pigtail.
Keywords :
integrated optics; micro-optics; micromachining; monitoring; optical arrays; optical communication equipment; optical fibre couplers; photodiodes; silicon; 250 mum; Si; bulk silicon micromachining technique; fiber insertion; fiber ribbon alignment structures; fiber ribbon arrays; fiber ribbons; integrated funnels; less structured wafer surface; photodiodes; precise rhombus-shaped channels; rhombus-shaped channels; silicon; single fiber pigtail; system monitoring; {100}-silicon; Anisotropic magnetoresistance; Arrayed waveguide gratings; Assembly; Etching; Micromachining; Optical fiber devices; Optical fibers; Optical surface waves; Protection; Silicon;
Journal_Title :
Photonics Technology Letters, IEEE
