Title :
Fabrication and characterization of an electromagnetic valve in a microfluidic device
Author :
Ribeiro, L.E.B. ; Fruett, F.
Author_Institution :
Lab. of Microelectron. Sensors - LSM, Univ. of Campinas - UNICAMP, Campinas, Brazil
Abstract :
In microfluidic devices, the integration of micro-sensors, reactors and actuators can result in a portable systems allowing the developing of several applications. In this work we fabricated and tested an electromagnetic valve which is compatible with a previously fabricated microfluidic sensor. The valve can be used to control the flux over a microchannel or even be combined to form a nozzle-diffuser micropump.
Keywords :
electromagnetic devices; microchannel flow; microfabrication; micropumps; microsensors; microvalves; nozzles; actuator; electromagnetic valve testing; microchannel; microfabrication; microfluidic sensor device; microsensor; nozzle-diffuser micropump; portable system; reactor; Biomedical optical imaging; Educational institutions; Electromagnetics; Glass; Microchannels; Microfluidics; Optical device fabrication; electromagnetic actuator; microfluidic; valve;
Conference_Titel :
Microelectronics Technology and Devices (SBMicro), 2014 29th Symposium on
Conference_Location :
Aracaju
DOI :
10.1109/SBMicro.2014.6940096
