Title :
Quartz and GaPO4 pressure transducers for high resolution applications in high temperature: A simulation approach
Author :
Silva, Leonardo B. M. ; Santos, Edval J. P.
Author_Institution :
Lab. for Devices & Nanostruct. - LDN/NE2N, Univ. Fed. de Pernambuco, Recife, Brazil
Abstract :
An accurate computer model was created for the extraction of the quality factor, Q, and the sensitivity of piezoelectric pressure transducer. The quality factor is a key parameter to determine the transducer resolution. The effect of viscosity loss and geometrical factors, such as: thickness, diameter, and concavity (plano-convex and bi-convex) are simulated in AT-cut quartz and Hi-Q cut gallium phosphate (GaPO4) materials. AT-cut quartz is a standard material in this type of application, and gallium phosphate is a promising material for advanced pressure transducer. The goal is to evaluate device specifications to achieve the highest Q-factor (Q > 106) at frequencies up to 10 MHz. Temperature dependent elastic constants and boundary load conditions are used to simulate temperature and hydrostatic pressure effects on the vibrating transducer. The frequency shift is simulated in the range of 25 °C to 200 °C and 14.7 psi to 20,000 psi for temperature and pressure, respectively. The simulation results allows for a resolution of 1 psi for a frequency resolution of 1 ppm. All simulations are carried out with COMSOL Multiphysics software, version 4.4.
Keywords :
Q-factor; elastic constants; gallium compounds; high-pressure effects; piezoelectric transducers; pressure transducers; quartz; AT-cut quartz; COMSOL Multiphysics software; GaPO4; Hi-Q cut gallium phosphate; SiO2; boundary load conditions; computer model; frequency resolution; frequency shift; geometrical factor effect; high resolution applications; hydrostatic pressure effect; piezoelectric pressure transducer sensitivity; pressure 14.7 psi to 20000 psi; quality factor extraction; simulation approach; temperature 25 degC to 200 degC; temperature dependent elastic constants; temperature effect; transducer resolution; vibrating transducer; viscosity loss effect; Ultrasonic variables measurement; COMSOL; Gallium Phosphate; Quality factor; Quartz; high resolution; pressure; temperature; transducer;
Conference_Titel :
Microelectronics Technology and Devices (SBMicro), 2014 29th Symposium on
Conference_Location :
Aracaju
DOI :
10.1109/SBMicro.2014.6940116