• DocumentCode
    1362662
  • Title

    Best bits: Applications of microprocessors: Outguessing gases

  • Volume
    20
  • Issue
    7
  • fYear
    1983
  • fDate
    7/1/1983 12:00:00 AM
  • Firstpage
    26
  • Lastpage
    28
  • Abstract
    In semiconductor fabrication, processes such as chemical vapor deposition require a control panel to coordinate gas flow into and out of the chamber where chips are kept. Engineers must monitor the pressure of the chamber continually and manipulate theexchange of dangerous gases carefully. Formerly they wired a panel for each process controlled, keeping track of pressure and gas exchanges by reading dials and turning valves at the right moment. Now, however, a microprocessor-based panel can be programmed to control these processes more safely and without operator error, according to its manufacturer, the Tylan Corp. of San Mateo, Calif.
  • Keywords
    Instruments; Laser beams; Measurement by laser beam; Microprocessors; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1983.6369934
  • Filename
    6369934