DocumentCode
1362662
Title
Best bits: Applications of microprocessors: Outguessing gases
Volume
20
Issue
7
fYear
1983
fDate
7/1/1983 12:00:00 AM
Firstpage
26
Lastpage
28
Abstract
In semiconductor fabrication, processes such as chemical vapor deposition require a control panel to coordinate gas flow into and out of the chamber where chips are kept. Engineers must monitor the pressure of the chamber continually and manipulate theexchange of dangerous gases carefully. Formerly they wired a panel for each process controlled, keeping track of pressure and gas exchanges by reading dials and turning valves at the right moment. Now, however, a microprocessor-based panel can be programmed to control these processes more safely and without operator error, according to its manufacturer, the Tylan Corp. of San Mateo, Calif.
Keywords
Instruments; Laser beams; Measurement by laser beam; Microprocessors; Temperature measurement; Temperature sensors;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1983.6369934
Filename
6369934
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