A wide-band monolithic quasi-optical power meter for millimeter and submillimeter-wave applications

A novel monolithic power meter has been developed for submillimeter-wave applications (100 GHz to 10 THz). The detector is a large-area bismuth bolometer integrated on a 1.2-μm-thick dielectric membrane. This approach results in a wide-band, high-responsivity detector. The power meter is simple to fabricate, is inexpensive, and can be easily calibrated using a low-frequency network. Quasi-optical measurements at 90, 140, and 240 GHz show that the bolometer is polarization-independent and could be modeled by a simple transmission line model. Absolute power measurements at 90, 140, and 240 GHz show a ±5% accuracy and agree well with a calibration Anritsu power meter at 90 GHz. Potential application areas are power calibration, antenna coupling efficiency measurements, and absolute power measurements from solid-state devices and far-infrared lasers at submillimeter wavelengths. Absolute output power measurements on a 220-280 GHz tripler using the quasi-optical power meter are presented as an application example