Langasite as a piezoelectric material for near-field microscopy resonant cantilevers

Quartz length-extension resonators have already been used to obtain atomically-resolved images by frequency-modulation atomic force microscopy. Other piezoelectric materials such as gallium orthophosphate (GaPO₄), langatate (LGT), and langasite (LGS) could be appropriate for this application. In this paper, the advantages of langasite crystal are presented and the fabrication of similar microsensors in langasite temperature-compensated cuts by chemical etching is proved. A monolithic length extension resonator, with a tip at its end, is obtained which constitutes a real advantage in regard to the existing quartz devices.