• DocumentCode
    1363480
  • Title

    Fault Detection Based on Statistical Multivariate Analysis and Microarray Visualization

  • Author

    Ma, Ming-Da ; Wong, David Shan-Hill ; Jang, Shi-Shang ; Tseng, Sheng-Tsaing

  • Author_Institution
    Center for Control & Guidance Technol., Harbin Inst. of Technol., Harbin, China
  • Volume
    6
  • Issue
    1
  • fYear
    2010
  • Firstpage
    18
  • Lastpage
    24
  • Abstract
    In this work, a statistical method is proposed to mine out key variables from a large set of variables recorded in a limited number of runs through a multistage multistep manufacturing process. The method employed well-known single variable or multivariable techniques of discrimination and regression but also presented a synopsis of analysis results in a colored map of p-values very similar to a DNA microarray. This framework provides a systematic method of drawing inferences from the available evidence without interrupting the normal process operation. The proposed concept is illustrated by two industrial examples.
  • Keywords
    data visualisation; fault diagnosis; inference mechanisms; manufacturing processes; statistical analysis; DNA microarray; colored map; fault detection; microarray visualization; multistage multistep manufacturing process; statistical multivariate analysis; Fault detection; Wilcoxon rank-sum test; microarray; quality improvement; semiconductor manufacturing;
  • fLanguage
    English
  • Journal_Title
    Industrial Informatics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1551-3203
  • Type

    jour

  • DOI
    10.1109/TII.2009.2030793
  • Filename
    5232820