DocumentCode
1363480
Title
Fault Detection Based on Statistical Multivariate Analysis and Microarray Visualization
Author
Ma, Ming-Da ; Wong, David Shan-Hill ; Jang, Shi-Shang ; Tseng, Sheng-Tsaing
Author_Institution
Center for Control & Guidance Technol., Harbin Inst. of Technol., Harbin, China
Volume
6
Issue
1
fYear
2010
Firstpage
18
Lastpage
24
Abstract
In this work, a statistical method is proposed to mine out key variables from a large set of variables recorded in a limited number of runs through a multistage multistep manufacturing process. The method employed well-known single variable or multivariable techniques of discrimination and regression but also presented a synopsis of analysis results in a colored map of p-values very similar to a DNA microarray. This framework provides a systematic method of drawing inferences from the available evidence without interrupting the normal process operation. The proposed concept is illustrated by two industrial examples.
Keywords
data visualisation; fault diagnosis; inference mechanisms; manufacturing processes; statistical analysis; DNA microarray; colored map; fault detection; microarray visualization; multistage multistep manufacturing process; statistical multivariate analysis; Fault detection; Wilcoxon rank-sum test; microarray; quality improvement; semiconductor manufacturing;
fLanguage
English
Journal_Title
Industrial Informatics, IEEE Transactions on
Publisher
ieee
ISSN
1551-3203
Type
jour
DOI
10.1109/TII.2009.2030793
Filename
5232820
Link To Document