DocumentCode :
1363942
Title :
Solid state: Memories amass more data per chip, while several companies ready the first nonoptical lithography machines
Author :
Fischetti, M.A.
Author_Institution :
IEEE Spectrum, New York, NY, USA
Volume :
21
Issue :
1
fYear :
1984
Firstpage :
58
Lastpage :
63
Abstract :
A discussion is presented of the `plate pushing´ technique which works by pulsing the plate in a cell between ground and voltage-supply level, raising the signal above the supply level. In effect, this forces additional charge out of a storage capacitor when the capacitor is accessed. Thus, smaller capacitors can be used, increasing the density of the chip. Also examined is the production of the 256KB RAM, commercial production of GaAs chips, and the new lithographic systems.
Keywords :
PROM; gallium arsenide; lithography; random-access storage; semiconductor device manufacture; semiconductor devices; 256KB RAM; GaAs chips; PROM; commercial production; lithographic systems; plate pushing; programmable read only memory; random access storage; semiconductor device manufacture; Companies; Gallium arsenide; Integrated optics; Lithography; Optical device fabrication; Random access memory; Read only memory;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1984.6370142
Filename :
6370142
Link To Document :
بازگشت