• DocumentCode
    1363942
  • Title

    Solid state: Memories amass more data per chip, while several companies ready the first nonoptical lithography machines

  • Author

    Fischetti, M.A.

  • Author_Institution
    IEEE Spectrum, New York, NY, USA
  • Volume
    21
  • Issue
    1
  • fYear
    1984
  • Firstpage
    58
  • Lastpage
    63
  • Abstract
    A discussion is presented of the `plate pushing´ technique which works by pulsing the plate in a cell between ground and voltage-supply level, raising the signal above the supply level. In effect, this forces additional charge out of a storage capacitor when the capacitor is accessed. Thus, smaller capacitors can be used, increasing the density of the chip. Also examined is the production of the 256KB RAM, commercial production of GaAs chips, and the new lithographic systems.
  • Keywords
    PROM; gallium arsenide; lithography; random-access storage; semiconductor device manufacture; semiconductor devices; 256KB RAM; GaAs chips; PROM; commercial production; lithographic systems; plate pushing; programmable read only memory; random access storage; semiconductor device manufacture; Companies; Gallium arsenide; Integrated optics; Lithography; Optical device fabrication; Random access memory; Read only memory;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1984.6370142
  • Filename
    6370142