DocumentCode :
1364025
Title :
Best Paper Award
Volume :
9
Issue :
3
fYear :
1996
Firstpage :
293
Keywords :
Awards;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.1996.536101
Filename :
536101
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1364025
