Characterization of broad-band transmission for coplanar waveguides on CMOS silicon substrates

Author

Milanovic, Veljko ; Ozgur, Mehmet ; DeGroot, Donald C. ; Jargon, Jeffrey A. ; Gaitan, Michael ; Zaghloul, Mona E.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA

Volume

46

Issue

5

fYear

1998

fDate

5/1/1998 12:00:00 AM

Firstpage

632

Lastpage

640

Abstract

This paper presents characteristics of microwave transmission in coplanar waveguides (CPW´s) on silicon (Si) substrates fabricated through commercial CMOS foundries. Due to the CMOS fabrication, the metal strips of the CPW are encapsulated in thin films of Si dioxide. Many test sets were fabricated with different line dimensions, all on p-type substrates with resistivities in the range from 0.4 Ω·cm to 12.5 Ω·cm. Propagation constant and characteristic impedance measurements were performed at frequencies from 0.1 to 40 GHz, using a vector-network analyzer and the through-reflect-line (TRL) deembedding technique. A quasi-TEM equivalent circuit model was developed from the available process parameters, which accounts for the effects of the electromagnetic fields in the CPW structure over a broad frequency range. The analysis was based on the conformal mapping of the CPW multilayer dielectric cross section to obtain accurate circuit representation for the effects of the transverse fields

Keywords

CMOS integrated circuits; coplanar waveguides; elemental semiconductors; encapsulation; equivalent circuits; field effect MMIC; integrated circuit measurement; microwave measurement; network analysers; silicon; 0.1 to 40 GHz; CMOS; CPW structure; Si; broad-band transmission; characteristic impedance measurements; conformal mapping; coplanar waveguides; electromagnetic fields; encapsulation; line dimensions; microwave transmission; p-type substrates; process parameters; propagation constant; quasi-TEM equivalent circuit model; test set; through-reflect-line deembedding technique; transverse fields; vector-network analyzer; Conductivity; Coplanar waveguides; Electromagnetic waveguides; Fabrication; Foundries; Frequency; Semiconductor thin films; Silicon; Strips; Testing;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.668675

Filename

668675