Title :
Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime
Author :
Lee, Hyung Kyu ; Melamud, Renata ; Chandorkar, Saurabh ; Salvia, James ; Yoneoka, Shingo ; Kenny, Thomas W.
Author_Institution :
Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
In microelectromechanical systems resonators, nonlinear operation is feasible, but instabilities can arise if open-loop resonators operate above the critical vibration amplitude. This fact has led to a reluctance to operate resonator-based oscillators above this amplitude. This study experimentally demonstrates stable operation of these oscillators far beyond the critical vibration amplitude.
Keywords :
micromechanical resonators; open loop systems; oscillators; vibrations; MEMS oscillators; critical vibration amplitude; microelectromechanical systems resonators; nonlinear operation; nonlinear regime; open-loop resonators; Current measurement; Frequency measurement; Micromechanical devices; Phase noise; Resonant frequency; Vibrations; Nonlinearity; oscillators; resonators; stability;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2011.2170821
