• DocumentCode
    1364720
  • Title

    Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime

  • Author

    Lee, Hyung Kyu ; Melamud, Renata ; Chandorkar, Saurabh ; Salvia, James ; Yoneoka, Shingo ; Kenny, Thomas W.

  • Author_Institution
    Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA
  • Volume
    20
  • Issue
    6
  • fYear
    2011
  • Firstpage
    1228
  • Lastpage
    1230
  • Abstract
    In microelectromechanical systems resonators, nonlinear operation is feasible, but instabilities can arise if open-loop resonators operate above the critical vibration amplitude. This fact has led to a reluctance to operate resonator-based oscillators above this amplitude. This study experimentally demonstrates stable operation of these oscillators far beyond the critical vibration amplitude.
  • Keywords
    micromechanical resonators; open loop systems; oscillators; vibrations; MEMS oscillators; critical vibration amplitude; microelectromechanical systems resonators; nonlinear operation; nonlinear regime; open-loop resonators; Current measurement; Frequency measurement; Micromechanical devices; Phase noise; Resonant frequency; Vibrations; Nonlinearity; oscillators; resonators; stability;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2011.2170821
  • Filename
    6064860
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1364720