Silicon Carbide-Based Extreme Environment Hybrid Design Temperature Sensor Using Optical Pyrometry and Laser Interferometry

To the best of the authors´ knowledge, proposed and demonstrated is the first extreme environment temperature sensor using Blackbody (BB) radiation of a high-temperature material optical chip for coarse temperature measurement and classical Fabry-Perot (FP) laser interferometry via the same chip for fine temperature measurement. Such a hybrid design sensor can be used to accurately measure temperatures in excess of 750°C such as needed for gas turbines in power plants and aircraft engines. The proposed sensor is designed and demonstrated using an all-Silicon Carbide (SiC) probe for temperatures from 795°C to 1077°C with an estimated average measurement resolution of 0.1°C.