Title :
A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators
Author :
Lee, Chengkuo ; Hsiao, Fu-Li ; Kobayashi, Takeshi ; Koh, Kah How ; Ramana, P.V. ; Xiang, Wenfeng ; Yang, Bin ; Tan, Chee Wei ; Pinjala, D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
Keywords :
integrated optics; lead compounds; micro-optomechanical devices; micromirrors; optical attenuators; optical collimators; optical fibres; piezoelectric actuators; piezoelectric materials; silicon; thin film devices; 3-D light attenuation arrangement; MEMS; PZT; Si; driving voltage; dual core fiber collimator; microelectromechanical systems; reflection mirror; rotational mirror; thin-film actuators; variable optical attenuator; voltage 1 V; Microelectromechanical systems (MEMS); PZT; mirror; optical MEMS; piezoelectric actuator; variable optical attenuators (VOAs);
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2009.2022959
