A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

Author

Lee, Chengkuo ; Hsiao, Fu-Li ; Kobayashi, Takeshi ; Koh, Kah How ; Ramana, P.V. ; Xiang, Wenfeng ; Yang, Bin ; Tan, Chee Wei ; Pinjala, D.

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

Volume

15

Issue

5

fYear

2009

Firstpage

1529

Lastpage

1536

Abstract

A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

Keywords

integrated optics; lead compounds; micro-optomechanical devices; micromirrors; optical attenuators; optical collimators; optical fibres; piezoelectric actuators; piezoelectric materials; silicon; thin film devices; 3-D light attenuation arrangement; MEMS; PZT; Si; driving voltage; dual core fiber collimator; microelectromechanical systems; reflection mirror; rotational mirror; thin-film actuators; variable optical attenuator; voltage 1 V; Microelectromechanical systems (MEMS); PZT; mirror; optical MEMS; piezoelectric actuator; variable optical attenuators (VOAs);

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2009.2022959

Filename

5233850