Title :
Miniaturized sensors for the viscosity and density of liquids-performance and issues
Author :
Jakoby, Bernhard ; Beigelbeck, Roman ; Keplinger, Franz ; Lucklum, Frieder ; Niedermayer, Alexander ; Reichel, Erwin Konrad ; Riesch, Christian ; Voglhuber-Brunnmaier, Thomas ; Weiss, Bernhard
Author_Institution :
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
Abstract :
This paper reviews our recent work on vibrating sensors for the physical properties of fluids, particularly viscosity and density. Several device designs and the associated properties, specifically with respect to the sensed rheological domain and the onset of non-Newtonian behavior, are discussed.
Keywords :
density measurement; flow sensors; microsensors; non-Newtonian flow; rheology; viscosity measurement; liquid density; liquid viscosity; miniaturized sensors; nonNewtonian behavior; rheological domain sensing; vibrating sensors; Electrodes; Equivalent circuits; Liquids; Mechatronics; Monitoring; RLC circuits; Resonance; Sensor systems; Vibrations; Viscosity; Acoustics; Computer-Aided Design; Densitometry; Equipment Design; Equipment Failure Analysis; Micro-Electrical-Mechanical Systems; Miniaturization; Nephelometry and Turbidimetry; Reproducibility of Results; Sensitivity and Specificity; Transducers; Viscosity;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2010.1386
