Miniaturized sensors for the viscosity and density of liquids-performance and issues

Author

Jakoby, Bernhard ; Beigelbeck, Roman ; Keplinger, Franz ; Lucklum, Frieder ; Niedermayer, Alexander ; Reichel, Erwin Konrad ; Riesch, Christian ; Voglhuber-Brunnmaier, Thomas ; Weiss, Bernhard

Author_Institution

Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria

Volume

57

Issue

1

fYear

2010

Firstpage

111

Lastpage

120

Abstract

This paper reviews our recent work on vibrating sensors for the physical properties of fluids, particularly viscosity and density. Several device designs and the associated properties, specifically with respect to the sensed rheological domain and the onset of non-Newtonian behavior, are discussed.

Keywords

density measurement; flow sensors; microsensors; non-Newtonian flow; rheology; viscosity measurement; liquid density; liquid viscosity; miniaturized sensors; nonNewtonian behavior; rheological domain sensing; vibrating sensors; Electrodes; Equivalent circuits; Liquids; Mechatronics; Monitoring; RLC circuits; Resonance; Sensor systems; Vibrations; Viscosity; Acoustics; Computer-Aided Design; Densitometry; Equipment Design; Equipment Failure Analysis; Micro-Electrical-Mechanical Systems; Miniaturization; Nephelometry and Turbidimetry; Reproducibility of Results; Sensitivity and Specificity; Transducers; Viscosity;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2010.1386

Filename

5361530