DocumentCode :
1366516
Title :
A Novel Filter Rating Method Using Less Than 30-nm Gold Nanoparticle and Protective Ligand
Author :
Mizuno, Takehito ; Namiki, Akihisa ; Tsuzuki, Shuichi
Author_Institution :
Pi-Technol. Div., Nihon Pall Ltd., Ami, Japan
Volume :
22
Issue :
4
fYear :
2009
Firstpage :
452
Lastpage :
461
Abstract :
This paper describes a novel filter rating method beyond the current 30-nm limit by combining dynamic light scattering and inductively coupled plasma mass spectrometer technique and proposes the use of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand addition is investigated in order to decrease the adsorbing effect between gold nanoparticle and membrane surface.
Keywords :
adsorption; gold; light scattering; membranes; nanofiltration; semiconductor technology; Au; adsorbing effect; dynamic light scattering; filter rating method; gold nanoparticle; inductively coupled plasma mass spectrometer technique; membrane surface; microfiltration; protective ligand addition; ultrafiltration; Filters; gold; membranes; metals; particle measurements;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2009.2031762
Filename :
5235109
Link To Document :
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