Influence of Seed Layer Systems and Their Premagnetization by Low Temperature Annealing on Electrodeposited Ni-Fe Fluxgate Cores

Author

Kirchhoff, Maren Ramona ; Jordan, Alexa ; Büttgenbach, Stephanus

Author_Institution

Inst. for Microtechnol., Tech. Univ. Braunschweig, Braunschweig, Germany

Volume

47

Issue

1

fYear

2011

Firstpage

161

Lastpage

169

Abstract

Electrodeposited ferromagnetic nickel-iron is used as functional layers in several microsystems, e.g., in micro fluxgate magnetometers. The magnetic properties of the flux guiding magnetometer core structures characterize the sensor response. In this work, the influences of substrate, undercoating, and seed layer on the physical and magnetic properties of electrodeposited fluxgate cores are discussed. In addition, a magnetic annealing process with a temperature profile below Curie-temperature T_C is applied to the seed layer system, which accelerates the annealing time and reduces material stresses caused by high-temperature core treatment.

Keywords

Curie temperature; ferromagnetic materials; iron alloys; magnetic annealing; magnetic sensors; magnetisation; magnetometers; nickel alloys; Curie-temperature; Fe-Ni; annealing time; electrodeposited fluxgate cores; ferromagnetic nickel-iron; flux guiding magnetometer core structures; high-temperature core treatment; low temperature annealing; magnetic annealing; magnetic properties; micro fluxgate magnetometers; premagnetization; seed layer systems; sensor response; Annealing; Magnetic cores; Magnetic hysteresis; Perpendicular magnetic anisotropy; Saturation magnetization; Substrates; Annealing; ferromagnetic materials; magnetic anisotropy; nickel alloys;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2010.2090536

Filename

5617281